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Purchases of Equity Securities by the Issuer and Affiliated Purchasers (Details) (EUR €)
 0 Months Ended 1 Months Ended 11 Months Ended 12 Months Ended
Jan. 31, 2012
Dec. 31, 2012
Dec. 14, 2012
Nov. 30, 2012
Oct. 31, 2012
Sep. 30, 2012
Aug. 31, 2012
Jul. 29, 2012
Jun. 30, 2012
May 31, 2012
Apr. 30, 2012
Mar. 31, 2012
Feb. 28, 2012
Jan. 19, 2011
Nov. 22, 2012
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Apr. 25, 2012
Equity, Class of Treasury Stock [Line Items]                                      
Total number of shares purchased 2,132,366 1,542,149   3,240,099 1,153,112       428,000 1,133,550 1,219,480 654,169 949,726 1,025,407     13,478,058      
Summary of shares repurchased                                      
Average price paid per share (EUR) € 32.65 € 48.24   € 44.10 € 41.86       € 40.65 € 38.61 € 36.88 € 37.18 € 35.76 € 34.71     € 39.71      
Total number of shares purchased as a part of publicly announced plans or programs 2,132,366 13,478,058 2,200,000 11,935,909 8,695,810 7,542,698 7,542,698 7,542,698 7,114,698 5,981,148 4,761,668 4,107,499 3,157,773   11,278,058        
Maximum value of shares that may yet be purchased under the plans or program € 360,369,363 [1]         € 112,099,413 [1] € 160,366,940 [1] € 160,366,940 [1] € 160,366,940 [1] € 177,764,616 [1] € 221,530,029 [1] € 266,501,698 [1] € 290,820,741 [1] € 324,780,615 [1]            
Maximum number of shares that may yet be purchased under program 2,200,000 [2]      1,542,149 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2] 2,200,000 [2]            
Purchases of Equity Securities by the Issuer and Affiliated Purchasers (Textual) [Abstract]                                      
Repurchase program agreement, maximum percentage authorized to buy back                                     Up to a maximum of two times 10.0 percent of our issued share capital as of the date of authorization
Maximum amount of shares intended to be repurchased                           1,000,000,000          
Value of shares repurchased during the period     105,200,000                       430,000,000        
Average price paid per share     € 47.81                       € 38.13 € 39.91      
Conversion of stock, Shares Issued                               77      
Conversion of stock, Shares Converted                               100      
Capital repayment                               (3,728,324,000) [3],[4]        
Maximum amount of shares intended to be repurchased                               € 1,130,000,000      
Amount of decrease in nominal value per ordinary share upon third amendment                               € 9.18      
Synthetic Share Buyback [Member]
                                      
Equity, Class of Treasury Stock [Line Items]                                      
Total number of shares purchased                               93,411,216      
[1] Program to purchase shares up to a maximum amount of EUR 1,130 million. We have or will cancel these shares.
[2] Program to purchase up to 2.2 million shares for the purpose of covering outstanding employee stock and stock option plans
[3] In 2012, as part of the capital repayment, EUR 3,728.3 million of shareholders' equity was returned to our shareholders (excluding Intel Corporation ("Intel"), Taiwan Semiconductor Manufacturing Company Ltd. ("TSMC") and Samsung Electronics Corporation ("Samsung") (collectively referred to as "participating customers" in the Customer Co-investment Program)) and the number of shares was reduced by 23 Percent. See Note 26.
[4] The difference of EUR 125.6 million between the capital repayment EUR 3,728.3 million and the net proceeds from issuance of shares EUR 3,853.9 million relates to the capital repayment on ASML's treasury shares which was also part of the Synthetic Share Buyback in November 2012.