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Related Party Transactions (Details) (EUR €)
 12 Months Ended 6 Months Ended 1 Months Ended
Dec. 31, 2012
Person
Dec. 31, 2011
Dec. 31, 2010
Jul. 06, 2012
Dec. 31, 2012
Intel [Member]
Jul. 09, 2012
Intel [Member]
Jul. 09, 2012
Foundation Administration Office MAKTSJAB [Member]
Jul. 09, 2012
Intel 450 MM NRE Funding Agreement [Member]
Jul. 09, 2012
Intel EUV NRE Funding Agreement [Member]
Related Party Transaction [Line Items]                  
Fund for R&D project         € 829,000,000 € 829,000,000   € 553,000,000 € 276,000,000
Investment in ordinary shares as percentage of issued share capital             15.00%    
Selling price of shares included in the customer co-investment program € 39.91     € 39.91     € 39.91    
Termination period of NRE funding agreement Dec. 31, 2017                
Net sales 4,731,555,000 5,651,035,000 [1] 4,507,938,000   301,700,000        
Outstanding balance         65,000,000        
Related Party Transactions (Textual) [Abstract]                  
Period of subordinated loan   14 years              
Subordinated loan   € 5,000,000              
Number of resigned members in supervisory board of related party 2                
[1] As of January 1, 2011, we adopted Accounting Standards Update ("ASU") 2009-13, "Revenue Arrangements with Multiple Deliverables" which amended ASC 605-25. The ASU was adopted prospectively and had an insignificant impact on timing and allocation of revenues. See Note 1 to the consolidated financial statements.