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Property, plant and equipment (Details) (EUR €)
 12 Months Ended 12 Months Ended
Dec. 31, 2012
Dec. 31, 2011
Dec. 31, 2010
Dec. 31, 2012
Variable Interest Entity [Member]
Dec. 31, 2011
Variable Interest Entity [Member]
Dec. 31, 2003
Variable Interest Entity [Member]
Shareholder
Dec. 31, 2012
Research and Development Expense [Member]
Dec. 31, 2011
Research and Development Expense [Member]
Dec. 31, 2010
Research and Development Expense [Member]
Dec. 31, 2012
Selling General and Administrative Expenses [Member]
Dec. 31, 2011
Selling General and Administrative Expenses [Member]
Dec. 31, 2010
Selling General and Administrative Expenses [Member]
Dec. 31, 2012
Cost of Sales [Member]
Dec. 31, 2011
Cost of Sales [Member]
Dec. 31, 2010
Cost of Sales [Member]
Dec. 31, 2011
Machinery and Equipment Furniture Fixtures and Other Equipment [Member]
Dec. 31, 2012
Land, buildings and constructions [Member]
Dec. 31, 2011
Land, buildings and constructions [Member]
Dec. 31, 2010
Land, buildings and constructions [Member]
Dec. 31, 2012
Machinery and equipment [Member]
Dec. 31, 2011
Machinery and equipment [Member]
Dec. 31, 2012
Machinery and equipment [Member]
Property Subject to Evaluation and Operating Lease [Member]
Dec. 31, 2011
Machinery and equipment [Member]
Property Subject to Evaluation and Operating Lease [Member]
Dec. 31, 2012
Leasehold improvements [Member]
Dec. 31, 2011
Leasehold improvements [Member]
Dec. 31, 2012
Furniture fixtures and other equipment [Member]
Dec. 31, 2011
Furniture fixtures and other equipment [Member]
Cost                                                      
Beginning Balance € 2,057,803,000 € 1,637,987,000                             € 742,141,000 € 526,855,000   € 764,023,000 € 609,253,000     € 206,660,000 € 185,635,000 € 344,979,000 € 316,244,000
Additions 386,295,000 619,103,000                             106,234,000 213,513,000   248,429,000 355,358,000     8,883,000 20,918,000 22,749,000 29,314,000
Disposals (348,563,000) (214,121,000)                             (347,000)      (317,022,000) (212,286,000)     (300,000) (216,000) (30,894,000) (1,619,000)
Effect of changes in exchange rates (6,116,000) 14,834,000                             (995,000) 1,773,000   (4,671,000) 11,698,000     (391,000) 323,000 (59,000) 1,040,000
Ending Balance 2,089,419,000 2,057,803,000 1,637,987,000                           847,033,000 742,141,000 526,855,000 690,759,000 764,023,000     214,852,000 206,660,000 336,775,000 344,979,000
Accumulated depreciation and impairment                                                      
Beginning Balance 1,004,193,000 892,656,000                             155,877,000 127,509,000   401,800,000 358,026,000     145,775,000 129,741,000 300,741,000 277,380,000
Depreciation 179,253,000 158,033,000 144,600,000       15,300,000 24,900,000 16,700,000 16,300,000 15,400,000 19,200,000 147,700,000 117,700,000 108,700,000   31,598,000 27,362,000   110,571,000 99,968,000     13,416,000 13,128,000 23,668,000 17,575,000
Impairment charges 3,234,000 12,272,000 8,600,000       500,000 3,500,000 700,000 1,700,000 2,600,000 600,000 1,000,000 6,200,000 7,300,000 9,500,000 649,000    6,700,000 906,000 3,508,000        2,789,000 1,679,000 5,975,000
Disposals (123,375,000) (65,446,000)                             (347,000)      (92,205,000) (64,417,000)     (248,000) (41,000) (30,575,000) (988,000)
Effect of changes in exchange rates (3,809,000) 6,678,000                             (505,000) 1,006,000   (3,090,000) 4,715,000     (165,000) 158,000 (49,000) 799,000
Ending Balance 1,059,496,000 1,004,193,000 892,656,000                           187,272,000 155,877,000 127,509,000 417,982,000 401,800,000     158,778,000 145,775,000 295,464,000 300,741,000
Carrying amount                                                      
Carrying amount 1,029,923,000 1,053,610,000                             659,761,000 586,264,000   272,777,000 362,223,000 82,200,000 201,400,000 56,074,000 60,885,000 41,311,000 44,238,000
Property, plant and equipment (Textual) [Abstract]                                                      
Assets under construction in carrying amount                                 5,500,000 165,000,000   21,800,000 16,600,000     1,000,000 1,300,000 9,300,000 8,000,000
Land 60,700,000 51,100,000                                                  
Additions related to non-cash transfers from inventory 204,800,000 300,500,000 214,100,000                                                
Other non cash movements 9,600,000 17,700,000                                                  
Disposal related to non-cash transfers to inventory 222,900,000 145,300,000 110,400,000                                                
Impairment charges 3,234,000 12,272,000 8,600,000       500,000 3,500,000 700,000 1,700,000 2,600,000 600,000 1,000,000 6,200,000 7,300,000 9,500,000 649,000    6,700,000 906,000 3,508,000        2,789,000 1,679,000 5,975,000
Depreciation 179,253,000 158,033,000 144,600,000       15,300,000 24,900,000 16,700,000 16,300,000 15,400,000 19,200,000 147,700,000 117,700,000 108,700,000   31,598,000 27,362,000   110,571,000 99,968,000     13,416,000 13,128,000 23,668,000 17,575,000
Estimated fair value of assets, value used to determine amount of impairment charge 100,000                             1,900,000     400,000             100,000  
Carrying amount 1,029,923,000 1,053,610,000                             659,761,000 586,264,000   272,777,000 362,223,000 82,200,000 201,400,000 56,074,000 60,885,000 41,311,000 44,238,000
Lease period of property relating to the variable interest entity           15 years                                          
Lessor's shareholders equity relating to the variable interest entity           1,900,000                                          
Loans per shareholder relating to the variable interest entity           11,600,000                                          
Loan from bank relating to the variable interest entity           12,300,000                                          
Subordinated loan by ASML to parent of the lessor relating to the variable interest entity           5,400,000                                          
Exercise price of purchase option relating to the variable interest entity at end of lease           24,500,000                                          
Expiration date of purchase option relating to the variable interest entity           2018                                          
Total assets of the lessor relating to the variable interest entity at inception of the lease           54.5                                          
Use of buildings relating to the variable interest entity           15 years                                          
VIE carrying amount       32.4 33.8                                            
Number of shareholders that have granted a loan relating to the variable interest entity           3                                          
Total amount of granted loan relating to the variable interest entity           € 47,100,000