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Related parties and variable interest entities - Schedule of Related Party Transactions (Details) - EUR (€) € in Millions | 12 Months Ended
--- | ---
Dec. 31, 2022 | Dec. 31, 2021 | Dec. 31, 2020
Related Party Transaction [Line Items] |  |  |  |
Loan receivable | [1] | € 364.4 | € 124.4 |
Equity method investments |  | € 923.6 | 892.5 |
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Ownership percentage (in percentage) |  | 24.90% |  |
Maximum exposure to loss |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Equity method investments |  | € 923.6 |  |
Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Loan receivable |  | 364.4 | 124.4 |
Accounts payable |  | 269.2 | 482.7 |
Accrued and other liabilities |  | 111.2 | 0.0 |
Total purchases |  | 2,693.6 | 2,070.3 | € 1,623.9
Carl Zeiss SMT Holding GmbH & Co. KG | Maximum exposure to loss |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Loan receivable |  | 364.4 |  |
Accounts payable |  | 0.0 |  |
Accrued and other liabilities |  | 0.0 |  |
Other assets | Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments |  | 1,100.3 | 982.8 |
Other assets | Carl Zeiss SMT Holding GmbH & Co. KG | Maximum exposure to loss |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments |  | 1,100.3 |  |
Property, plant and equipment | Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments |  | 70.0 | € 82.1 |
Property, plant and equipment | Carl Zeiss SMT Holding GmbH & Co. KG | Maximum exposure to loss |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments |  | € 70.0 |  |
[1] | Loan receivable includes amounts with related parties of €364.4 million and €124.4 million at December 31, 2022 and 2021, respectively.

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