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Equity method investments - Additional Information (Details) - EUR (€) € in Millions |  | 12 Months Ended
--- | --- | ---
Jun. 29, 2017 | Dec. 31, 2022 | Dec. 31, 2021 | Dec. 31, 2020
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Profit from equity method investments |  | € 138.0 | € 199.1 |  | € 88.6
Cash received equity method investments |  | € 178.7 | 168.0 | [1] | € 128.1
Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Weighted average useful life of finite-lived intangible assets acquired |  | 14 years 1 month 6 days |  |  |
Equity method investment acquisition date | Jun. 29, 2017 |  |  |  |
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Ownership percentage (in percentage) |  | 24.90% |  |  |
Carl Zeiss SMT Holding GmbH & Co. KG | Share of net income (loss) after accounting policy alignment |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Profit from equity method investments |  | € 169.1 | 246.5 |  |
Carl Zeiss SMT Holding GmbH & Co. KG | Basis difference amortization |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Profit from equity method investments |  | 26.7 | 26.7 |  |
Carl Zeiss SMT Holding GmbH & Co. KG | Intercompany profit elimination |  |  |  |  |
Schedule of Equity Method Investments [Line Items] |  |  |  |  |
Profit from equity method investments |  | € 4.4 | € 20.7 |  |
[1] | Depreciation and amortization include depreciation of property, plant and equipment, amortization of intangible assets, depreciation of right-of-use assets, amortization of underwriting commissions and discount related to the bonds and credit facility.

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