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Related parties and variable interest entities - Additional information (Detail)
12 Months Ended 60 Months Ended
Dec. 31, 2022
EUR (€)
element
Dec. 31, 2021
EUR (€)
Dec. 31, 2020
EUR (€)
Dec. 31, 2020
EUR (€)
Feb. 15, 2023
EUR (€)
Sep. 30, 2022
EUR (€)
Sep. 29, 2021
EUR (€)
Related Party Transaction [Line Items]              
Loan receivable [1] € 364,400,000 € 124,400,000          
Repayment grace period, loan to related parties 3 years            
Number of elements | element 2            
Zeiss High-NA Funding Commitment              
Related Party Transaction [Line Items]              
Amount paid under contractual obligation       € 969,100,000      
Zeiss High-NA Funding Commitment | Research and development support provided              
Related Party Transaction [Line Items]              
Amount paid under contractual obligation       305,500,000      
Commitment consideration paid € 76,600,000 61,200,000 € 96,100,000        
Zeiss High-NA Funding Commitment | Capital expenditure support provided              
Related Party Transaction [Line Items]              
Amount paid under contractual obligation       € 663,600,000      
Carl Zeiss SMT GmbH              
Related Party Transaction [Line Items]              
Term of loan to related parties 10 years            
Carl Zeiss SMT GmbH | Zeiss High-NA Funding Commitment              
Related Party Transaction [Line Items]              
Loan receivable           € 240,000,000 € 124,400,000
Commitment consideration paid   € 221,400,000          
Any Director or Officer of ASML or any Associate Thereof              
Related Party Transaction [Line Items]              
Transactions outside the normal course of business € 0            
Due from (to) related party 0            
Any Director or Officer of ASML or any Associate Thereof | Subsequent Event              
Related Party Transaction [Line Items]              
Due from (to) related party         € 0    
Maximum | Carl Zeiss SMT GmbH              
Related Party Transaction [Line Items]              
Loan receivable € 1,000,000,000            
Interest rate on principal amount (in percentage) 1.00%            
Minimum | Carl Zeiss SMT GmbH              
Related Party Transaction [Line Items]              
Interest rate on principal amount (in percentage) 0.01%            
Carl Zeiss SMT GmbH | Carl Zeiss SMT Holding GmbH & Co. KG              
Related Party Transaction [Line Items]              
Ownership interest (in percentage) 100.00%            
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG              
Related Party Transaction [Line Items]              
Ownership percentage (in percentage) 24.90%            
[1] Loan receivable includes amounts with related parties of €364.4 million and €124.4 million at December 31, 2022 and 2021, respectively.