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Revenue from contracts with customer - Net System Sales per Technology (Details) € in Millions	12 Months Ended
	Dec. 31, 2022 EUR (€) Unit	Dec. 31, 2021 EUR (€) Unit	Dec. 31, 2020 EUR (€) Unit
Disaggregation of Revenue [Line Items]
Total net sales	€ 21,173.4	€ 18,611.0	€ 13,978.5
Net system sales
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	561	505	395
Total net sales	€ 15,430.3	€ 13,652.8	€ 10,316.6
EUV
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	40	42	31
Total net sales	€ 7,045.3	€ 6,284.0	€ 4,463.8
ArFi
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	81	81	68
Total net sales	€ 5,236.5	€ 4,959.6	€ 3,917.0
ArF dry
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	28	22	22
Total net sales	€ 623.7	€ 431.9	€ 427.0
KrF
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	151	131	103
Total net sales	€ 1,653.7	€ 1,321.3	€ 1,012.3
I-line
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	45	33	34
Total net sales	€ 211.5	€ 142.3	€ 146.4
Metrology & Inspection
Disaggregation of Revenue [Line Items]
Net system sales in units (in units) | Unit	216	196	137
Total net sales	€ 659.6	€ 513.7	€ 350.1

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Revenue From Contract With Customer, Excluding Assessed Tax, Number Of Units

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Amount, excluding tax collected from customer, of revenue from satisfaction of performance obligation by transferring promised good or service to customer. Tax collected from customer is tax assessed by governmental authority that is both imposed on and concurrent with specific revenue-producing transaction, including, but not limited to, sales, use, value added and excise.

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