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Revenue from contracts with customer - Net System Sales per End-Use (Details)
€ in Millions
12 Months Ended
Dec. 31, 2022
EUR (€)
Unit
Dec. 31, 2021
EUR (€)
Unit
Dec. 31, 2020
EUR (€)
Unit
Disaggregation of Revenue [Line Items]      
Total net sales € 21,173.4 € 18,611.0 € 13,978.5
Net system sales      
Disaggregation of Revenue [Line Items]      
Net system sales in units (in units) | Unit 561 505 395
Total net sales € 15,430.3 € 13,652.8 € 10,316.6
Net system sales | Logic      
Disaggregation of Revenue [Line Items]      
Net system sales in units (in units) | Unit 357 327 260
Total net sales € 9,977.6 € 9,588.5 € 7,393.0
Net system sales | Memory      
Disaggregation of Revenue [Line Items]      
Net system sales in units (in units) | Unit 204 178 135
Total net sales € 5,452.7 € 4,064.3 € 2,923.6