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Share-based compensation (Tables)

12 Months Ended

Dec. 31, 2023

Share-Based Payment Arrangement [Abstract]

Schedule of Share-Based Payment Schedule of Share-Based Payment Arrangement By Share-Based Payment Award, Performance Criteria

The table below shows the performance criteria and the corresponding weight of the LTI performance plans granted

in 2023.

LTI performance plan criteria	Market/Non-Market element	Weight
Relative TSR	Market	30%
Strategic value drivers	Non-Market	30%
Technology Leadership Index	Non-Market	20%
ESG Measures	Non-Market	20%
Total		100%

Schedule of Assumptions Used for Calculation of the Fair Value of Shares

The most important assumptions for the calculation of the fair value of shares for the LTI performance plans, which

include a market-based performance criteria, are set out in the following table:

Year ended December 31	2021	2022		2023
Share price in € at grant date	462.9	548.0		620.1
Expected volatility ASML	38.5%	41.8%		46.2%
Expected volatility PHLX index	35.3%	n/a		n/a
Average volatility of the peer group (market practice)	n/a	47.8%		50.0%
Vesting period	2.9 years	2.7 years		2.9 years
Dividend yield	0.6%	1.0%		0.9%
Risk free interest rate (Eurozone)	(0.8)%	0.5%		2.4%
Risk free interest rate (US)	0.2%	2.8%		3.9%

Schedule of Expenses for Share Plans

Expenses for LTI plans, including the Board of Management, were as follows:

Year ended December 31 (€, in millions)	2021	2022		2023
Total incurred expenses	117.5	68.9		134.8
Recognized income tax benefit (excluding excess income tax benefits)	8.2	10.2		16.3
Total expected expenses in future periods	125.4	113.0		187.2
Weighted average period in which these expected expenses are to be recognized	1.7 years	1.4 years		1.6 years

Schedule of Shares Activity During Period

Details with respect to shares granted and vested during the year are set out in the following table:

	EUR-denominated				USD-denominated
Year ended December 31	2021	2022		2023	2021	2022		2023
Total fair value at vesting date of shares vested during the year (in millions)	156.9	120.6		175.5	164.0	149.6		127.0
Weighted average fair value of shares granted	547.79	578.65		587.42	498.64	553.61		624.10

A summary of the status of conditionally outstanding shares as of December 31, 2023, and changes during the year

ended December 31, 2023, is presented below:

	EUR-denominated		USD-denominated
	Number of shares	Weighted average fair value at grant date	Number of shares	Weighted average fair value at grant date
Conditional shares outstanding at January 1, 2023	292,765	434.10	238,394	542.22
Granted	244,069	587.42	295,235	624.10
Vested	(257,451)	425.34	(167,746)	515.96
Forfeited	(3,812)	557.77	(2,764)	622.98
Conditional shares outstanding at December 31, 2023	275,571	576.37	363,119	620.31

Details with respect to stock options exercised and outstanding are set out in the following table:

	EUR-denominated				USD-denominated
Year ended December 31	2021	2022		2023	2021	2022		2023
Weighted average share price at the exercise date of stock options	583.33	494.14		613.03	658.16	565.39		678.41
Aggregate intrinsic value of stock options exercised (in millions)	5.7	4.4		8.1	4.1	1.6		4.8
Weighted average remaining contractual term of currently exercisable options (in years)	2.81	2.08		1.48	2.93	2.09		1.43
Aggregate intrinsic value of exercisable stock options (in millions)	36.7	20.3		19.7	24.9	14.6		15.9
Aggregate intrinsic value of outstanding stock options (in millions)	36.7	20.3		19.7	24.9	14.6		15.9

Schedule of Number and Weighted Average Exercise Prices of Stock Options Activity

The number and weighted average exercise prices of stock options as of December 31, 2023, and changes during

the year then ended are presented below:

	EUR-denominated		USD-denominated
	Number of options	Weighted average exercise price per ordinary share (EUR)	Number of options	Weighted average exercise price per ordinary share (USD)
Outstanding, January 1, 2023	47,607	77.95	32,138	92.84
Granted1	—	—	—	—
Exercised	(14,768)	67.80	(8,175)	89.40
Forfeited	—	—	—	—
Expired	—	—	(1)	92.23
Outstanding, December 31, 2023	32,839	82.52	23,962	94.01
Exercisable, December 31, 2023	32,839	82.52	23,962	94.01

1.Since 2017, we no longer grant options to our employees.

Schedule of Range of Exercise Prices, Number of Outstanding Options, and Weighted Average Remaining Contractual Life of Oustanding Options

Details with respect to stock options exercised in the relevant year and outstanding stock options as of December

31, 2023, are set out in the following table:

EUR-denominated			USD-denominated
Range of exercise prices (€)	Number of outstanding options	Weighted average remaining contractual life of outstanding (years)	Range of exercise prices (USD)	Number of outstanding options	Weighted average remaining contractual life of outstanding (years)
50–60	1,936	0.30	50–60	—	0.00
60–70	2,457	0.31	60–70	—	0.00
70–80	8,444	1.34	70–80	—	0.00
80–90	9,966	1.84	80–90	7,569	0.97
90–100	10,036	1.75	90–100	10,087	1.59
100–110	—	0.00	100–110	6,306	1.73
Total	32,839	1.48	Total	23,962	1.43

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Tabular disclosure of option exercise prices, by grouped ranges, including the upper and lower limits of the price range, the number of shares under option, weighted average exercise price and remaining contractual option terms.

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