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Other assets - Other Assets (Detail) - EUR (€)
€ in Millions
Dec. 31, 2023
Dec. 31, 2022
Schedule of Other Assets [Line Items]    
Prepaid expenses € 472.1 € 678.6
Derivative financial instruments 19.8 17.3
VAT receivable 302.2 201.2
Other assets 92.5 266.4
Other current assets  [1] 1,578.5 1,643.4
Prepaid expenses 40.9 32.4
Derivative financial instruments 11.3 0.0
Compensation plan assets 95.2 71.1
Other assets 13.6 15.9
Other non-current assets  [2] 651.8 739.8
Carl Zeiss SMT Holding GmbH & Co. KG    
Schedule of Other Assets [Line Items]    
Advance payments to Carl Zeiss SMT GmbH 691.9 479.9
Advance payments to Carl Zeiss SMT GmbH € 490.8 € 620.4
[1] Other assets – current includes amounts with related parties of €691.9 million and €479.9 million at December 31, 2023 and 2022, respectively.
[2] Other assets – non-current includes amounts with related parties of €490.8 million and €620.4 million at December 31, 2023 and 2022, respectively.