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Consolidated Statements of Cash Flows (Parenthetical) - EUR (€)
€ in Millions
12 Months Ended
Dec. 31, 2024
Dec. 31, 2023
Dec. 31, 2022
Cash received equity method investments € 225.4 € 218.0 [1] € 178.7
Loans issued and other investments [2] 526.2 561.5 240.0
Related party      
Loans issued and other investments € 528.4 548.0 240.0
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG      
Ownership percentage (in percentage) 24.90%    
Funding provided for tooling equity method investment      
Additions related to non-cash transfers € 0.0 € 45.1 € 33.8
[1] Depreciation and amortization include depreciation of property, plant and equipment, amortization of intangible assets, amortization of
underwriting commissions, and discount related to the bonds and credit facility.
[2] Loans issued and other investments includes a cash outflow of €528.4 million (2023: €548.0 million, 2022: €240.0 million) to related parties,
which is partly offset with other repayments.