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Related parties and variable interest entities - Schedule of Related Party Transactions (Details) - EUR (€)
€ in Millions

12 Months Ended

Dec. 31, 2024

Dec. 31, 2023

Dec. 31, 2022

Related Party Transaction [Line Items]

Loan receivable

^[1]

€ 1,456.6

€ 929.2

Investment agreement for 24.9% equity

903.0

919.6

Accounts receivable

^[2]

4,477.5

4,334.1

Accounts payable

^[3]

3,500.4

2,347.3

Total purchases

€ 3,946.5

3,325.9

€ 2,693.6

Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG

Related Party Transaction [Line Items]

Ownership percentage (in percentage)

24.90%

Related party

Related Party Transaction [Line Items]

Advance payments included in Other assets

€ 1,415.7

1,182.7

Loan receivable

1,440.8

912.4

Investment agreement for 24.9% equity

903.0

919.6

Accounts receivable

70.8

7.8

Accounts payable

955.8

4.0

Cost to be paid included in Accrued and other liabilities

199.9

€ 199.9

Related party | Maximum exposure to loss

Related Party Transaction [Line Items]

Advance payments included in Other assets

1,415.7

Loan receivable

1,440.8

Investment agreement for 24.9% equity

903.0

Accounts receivable

70.8

Accounts payable

0.0

Cost to be paid included in Accrued and other liabilities

€ 0.0

[1]	Loans receivable includes amounts with related parties of €1,440.8 million and €912.4 million at December 31, 2024 and 2023, respectively.
[2]	Accounts receivable includes amounts with related parties of €70.8 million and €7.8 million at December 31, 2024 and 2023, respectively.
[3]	Accounts payable includes amounts with related parties of €955.8 million and €4.0 million at December 31, 2024 and 2023, respectively.

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