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Related parties and variable interest entities - Schedule of Related Party Transactions (Details) - EUR (€) € in Millions | 12 Months Ended
--- | ---
Dec. 31, 2025 | Dec. 31, 2024 | Dec. 31, 2023
Related Party Transaction [Line Items] |  |  |  |
Investment agreement for 24.9% equity |  | € 822.6 | € 903.0 |
Accounts receivable | [1] | 3,023.0 | 4,477.5 |
Accounts payable | [2] | 3,521.8 | 3,500.4 |
Total purchases |  | € 4,406.9 | 3,946.5 | € 3,325.9
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Ownership percentage (in percentage) |  | 24.90% |  |
Related party |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments included in Other assets |  | € 1,191.9 | 1,415.7 |
Loans receivable |  | 1,907.5 | 1,440.8 |
Investment agreement for 24.9% equity |  | 822.6 | 903.0 |
Accounts receivable |  | 1.1 | 70.8 |
Accounts payable |  | 1,085.8 | 955.8 |
Cost to be paid included in Accrued and other liabilities |  | 123.0 | € 199.9 |
Related party | Maximum exposure to loss |  |  |  |
Related Party Transaction [Line Items] |  |  |  |
Advance payments included in Other assets |  | 1,191.9 |  |
Loans receivable |  | 1,907.5 |  |
Investment agreement for 24.9% equity |  | 822.6 |  |
Accounts receivable |  | 1.1 |  |
Accounts payable |  | 0.0 |  |
Cost to be paid included in Accrued and other liabilities |  | € 0.0 |  |
[1] | A ccounts receiva ble includes amounts with related parties of €1.1 million and €70.8 million at December 31, 2025 and 2024, respectively.
[2] | Accounts payable in cludes amo unts with related parties of €1,085.8 million and €955.8 million at December 31, 2025 and 2024, respectively.

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