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Consolidated Statements of Cash Flows (Parenthetical) - EUR (€)
€ in Millions
12 Months Ended
Dec. 31, 2025
Dec. 31, 2024
Dec. 31, 2023
Cash received equity method investments € 320.5 € 225.4 [1] € 218.0
Loans issued and other investments [2] 703.7 526.2 561.5
Repayment on loans from related parties 256.9 0.0 0.0
Related party      
Loans issued and other investments 703.7 528.4 548.0
Debt instrument, unamortized discount, current € 121.8 81.6 0.0
Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG      
Ownership percentage (in percentage) 24.90%    
Funding provided for tooling equity method investment      
Additions related to non-cash transfers € 0.0 € 0.0 € 45.1
[1] Depreciation and amortization include depreciation of property, plant and equipment, amortization of intangible assets, and other (amortization
of underwriting commissions, amortization of discounts related to borrowings, credit facilities and accretion of loans issued at a discount).
[2] Loans issued and other investments includes a cash outflow of €703.7 million (2024: €528.4 million, 2023: €548.0 million) net of €121.8 million
(2024: €81.6 million, 2023: €0.0 million) unamortized discount included in other assets, to related parties.