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Related parties and variable interest entities - Schedule of Related Party Transactions (Details) - EUR (€)
€ in Millions

12 Months Ended

Dec. 31, 2025

Dec. 31, 2024

Dec. 31, 2023

Related Party Transaction [Line Items]

Investment agreement for 24.9% equity

€ 822.6

€ 903.0

Accounts receivable

^[1]

3,023.0

4,477.5

Accounts payable

^[2]

3,521.8

3,500.4

Total purchases

€ 4,406.9

3,946.5

€ 3,325.9

Carl Zeiss SMT Holding GmbH & Co. KG | Carl Zeiss SMT Holding GmbH & Co. KG

Related Party Transaction [Line Items]

Ownership percentage (in percentage)

24.90%

Related party

Related Party Transaction [Line Items]

Advance payments included in Other assets

€ 1,191.9

1,415.7

Loans receivable

1,907.5

1,440.8

Investment agreement for 24.9% equity

822.6

903.0

Accounts receivable

1.1

70.8

Accounts payable

1,085.8

955.8

Cost to be paid included in Accrued and other liabilities

123.0

€ 199.9

Related party | Maximum exposure to loss

Related Party Transaction [Line Items]

Advance payments included in Other assets

1,191.9

Loans receivable

1,907.5

Investment agreement for 24.9% equity

822.6

Accounts receivable

1.1

Accounts payable

0.0

Cost to be paid included in Accrued and other liabilities

€ 0.0

[1]	Accounts receivable includes amounts with related parties of €1.1 million and €70.8 million at December 31, 2025 and 2024, respectively.
[2]	Accounts payable includes amounts with related parties of €1,085.8 million and €955.8 million at December 31, 2025 and 2024, respectively.

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