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Other assets - Other Assets (Details) - EUR (€)
€ in Millions
Dec. 31, 2025
Dec. 31, 2024
Schedule of Other Assets [Line Items]    
Prepaid expenses € 538.0 € 555.5
Derivative financial instruments 33.6 96.5
VAT receivable 187.2 279.1
Other assets 350.5 193.4
Other current assets  [1] 1,432.8 1,940.3
Prepaid expenses 46.1 49.5
Compensation plan assets 129.9 113.1
Other assets 12.7 28.3
Other non-current assets  [2] 1,057.1 790.8
Carl Zeiss SMT Holding GmbH & Co. KG    
Schedule of Other Assets [Line Items]    
Advance payments to Carl Zeiss SMT GmbH 323.5 815.8
Advance payments to Carl Zeiss SMT GmbH € 868.4 € 599.9
[1] Other assets – current includes amounts with related parties of €323.5 million and €815.8 million at December 31, 2025 and 2024, respectively.
[2] Other assets – non-current includes amounts with related parties of €868.4 million and €599.9 million at December 31, 2025 and 2024, respectively.