Media | 15 January 2014 09:38

SUSS MicroTec delivers 25th Mask TrackPro

(DGAP-Media / 15.01.2014 / 09:38)

PRESS RELEASE

SUSS MicroTec delivers 25 ^th Mask Track Pro

Garching, January 15, 2014 – SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, has delivered its 25 ^th Mask Track Pro System – the newest generation tool – to a leading Asian IDM at the end of 2013. This tool is a cleaning equipment for frontend photomasks in the semiconductor industry. The customer started the installation of this tool in December 2013 and will use it for cleaning and maintenance of optical masks for 193i Lithography in its new factory in China.

In the semiconductor industry, no other company has a comparable track record and as many installed systems. SUSS MicroTec is the leading provider for photomask cleaning equipment for the conventional 193i Lithography and the newly developed EUV Lithography.

‘In the semiconductor industry, the photomask is an important part of the frontend-infrastructure. At any given time the mask must be 100% perfect, otherwise any defect on the mask would replicate on every processed wafer.’, says Frank P. Averdung, President and CEO of SUSS MicroTec. ‘We have set the standards with our know-how and our photomask cleaning tools in 193nm Immersion-Lithography and the upcoming EUV Lithography.’

About SUSS MicroTec
SUSS MicroTec is a leading supplier of equipment and process solutions for microstructuring in the semiconductor industry and related markets. In close cooperation with research institutes and industry partners SUSS MicroTec contributes to the advancement of next-generation technologies such as 3D Integration and nanoimprint lithography as well as key processes for MEMS and LED manufacturing. With a global infrastructure for applications and service SUSS MicroTec supports more than 8.000 installed systems worldwide. SUSS MicroTec is headquartered in Garching near Munich, Germany. For more information, please visit http://www.suss.com

Contact:
SUSS MicroTec AG
Franka Schielke
Schleissheimer Strasse 90
85748 Garching, Deutschland
Tel.: +49 (0)89 32007-161
Fax: +49 (0)89 32007-451
Email: franka.schielke@suss.com

End of Media Release

Issuer: SÜSS MicroTec AG
Key word(s): Enterprise

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Language:	English
Company:	SÜSS MicroTec AG
	Schleissheimer Strasse 90
	85748 Garching
	Germany
Phone:	+49 (0)89 32007-161
Fax:	+49 (0)89 32007-451
E-mail:	ir@suss.com
Internet:	www.suss.com
ISIN:	DE000A1K0235
WKN:	A1K023
Listed:	Regulierter Markt in Frankfurt (Prime Standard); Freiverkehr in Berlin, Düsseldorf, Hamburg, München, Stuttgart

End of News DGAP-Media

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