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Supplementary Financial Statements Information (Inventories) (Details) - USD ($)
$ in Thousands
Jun. 30, 2023
Dec. 31, 2022
Inventory Disclosure [Abstract]    
Components $ 34,158 $ 43,017
Work in process 15,444 13,951
Finished products (including systems at customer locations not yet sold) 18,730 13,930
Total inventories 68,332 70,898
Current assets 61,207 65,541
Long-term assets $ 7,125 $ 5,357