0001193125-06-188801 10-Q 5 20060731 20060911 20060911 ADE CORP 0000884498 3825 042441829 MA 0430 10-Q 34 000-26714 061084835 80 WILSON WAY WESTWOOD MA 02090 6174673500 77 ROWE ST NEWTON MA 02166 10-Q 1 d10q.htm FORM 10-Q EX-31.1 2 dex311.htm SECTION 302 CEO CERTIFICATION EX-31.2 3 dex312.htm SECTION 302 CFO CERTIFICATION EX-32.1 4 dex321.htm SECTION 906 CEO CERTIFICATION EX-32.2 5 dex322.htm SECTION 906 CFO CERTIFICATION