
<TABLE> <S> <C>

<PAGE>
<ARTICLE> 5
<LEGEND>
THIS SCHEDULE CONTAINS SUMMARY FINANCIAL INFORMATION EXTRACTED FROM AUGUST
TECHNOLOGY CORPORATION DECEMBER 31, 1999 AND IS QUALIFIED IN ITS ENTIRETY BY
REFERENCE TO SUCH FINANCIAL STATEMENTS.
</LEGEND>

<S>                             <C>                     <C>
<PERIOD-TYPE>                   YEAR                   YEAR
<FISCAL-YEAR-END>                          DEC-31-1998             DEC-31-1999
<PERIOD-START>                             JAN-01-1998             JAN-01-1999
<PERIOD-END>                               DEC-31-1998             DEC-31-1999
<CASH>                                               0                       0
<SECURITIES>                                         0                       0
<RECEIVABLES>                                1,297,395               3,163,318
<ALLOWANCES>                                    15,000                  45,000
<INVENTORY>                                  1,022,549               2,459,485
<CURRENT-ASSETS>                             2,360,147               5,754,912
<PP&E>                                         502,065               1,214,490
<DEPRECIATION>                                 176,658                 292,948
<TOTAL-ASSETS>                               2,685,554               6,676,454
<CURRENT-LIABILITIES>                        1,235,366               3,261,176
<BONDS>                                              0                       0
<PREFERRED-MANDATORY>                                0                       0
<PREFERRED>                                          0                       0
<COMMON>                                        55,487                  61,093
<OTHER-SE>                                   1,355,701               3,285,937
<TOTAL-LIABILITY-AND-EQUITY>                 2,685,554               6,676,454
<SALES>                                      5,787,433              12,057,822
<TOTAL-REVENUES>                             5,787,433              12,057,822
<CGS>                                        2,685,764               5,109,770
<TOTAL-COSTS>                                2,685,764               5,109,770
<OTHER-EXPENSES>                             3,098,057               7,055,667
<LOSS-PROVISION>                                     0                       0
<INTEREST-EXPENSE>                               1,418                  41,878
<INCOME-PRETAX>                                  2,194               (149,493)
<INCOME-TAX>                                     2,300                (17,500)
<INCOME-CONTINUING>                              (106)               (131,993)
<DISCONTINUED>                                       0                       0
<EXTRAORDINARY>                                      0                       0
<CHANGES>                                            0                       0
<NET-INCOME>                                     (106)               (131,993)
<EPS-BASIC>                                          0                  (0.02)
<EPS-DILUTED>                                        0                  (0.02)


</TABLE>
