0000912057-00-012144 S-1 23 20000317 AUGUST TECHNOLOGY CORP 0001063527 411729485 MN 1231 S-1 33 333-32692 572209 4900 WEST 78TH STREET BLOOMINGTON MN 55435 9528200080 4900 WEST 78TH STREET BLOOMINGTON MN 55435 S-1 1 000091205700012144-001-seq1-s-1.txt S-1 EX-1.1 2 000091205700012144-002-seq2-ex-1-1.txt EXHIBIT 1.1 EX-3.1 3 000091205700012144-003-seq3-ex-3-1.txt EXHIBIT 3.1 EX-3.2 4 000091205700012144-004-seq4-ex-3-2.txt EXHIBIT 3.2 EX-10.1 5 000091205700012144-005-seq5-ex-10-1.txt EXHIBIT 10.1 EX-10.2 6 000091205700012144-006-seq6-ex-10-2.txt EXHIBIT 10.2 EX-10.3 7 000091205700012144-007-seq7-ex-10-3.txt EXHIBIT 10.3 EX-10.4 8 000091205700012144-008-seq8-ex-10-4.txt EXHIBIT 10.4 EX-10.5 9 000091205700012144-009-seq9-ex-10-5.txt EXHIBIT 10.5 EX-10.6 10 000091205700012144-010-seq10-ex-10-6.txt EXHIBIT 10.6 EX-10.7 11 000091205700012144-011-seq11-ex-10-7.txt EXHIBIT 10.7 EX-10.8 12 000091205700012144-012-seq12-ex-10-8.txt EXHIBIT 10.8 EX-10.9 13 000091205700012144-013-seq13-ex-10-9.txt EXHIBIT 10.9 EX-10.10 14 000091205700012144-014-seq14-ex-10-10.txt EXHIBIT 10.10 EX-10.11 15 000091205700012144-015-seq15-ex-10-11.txt EXHIBIT 10.11 EX-10.12 16 000091205700012144-016-seq16-ex-10-12.txt EXHIBIT 10.12 EX-10.13 17 000091205700012144-017-seq17-ex-10-13.txt EXHIBIT 10.13 EX-10.15 18 000091205700012144-018-seq18-ex-10-15.txt EXHIBIT 10.15 EX-10.16 19 000091205700012144-019-seq19-ex-10-16.txt EXHIBIT 10.16 EX-10.17 20 000091205700012144-020-seq20-ex-10-17.txt EXHIBIT 10.17 EX-10.18 21 000091205700012144-021-seq21-ex-10-18.txt EXHIBIT 10.18 EX-23.1 22 000091205700012144-022-seq22-ex-23-1.txt EXHIBIT 23.1 EX-27.1 23 000091205700012144-023-seq23-ex-27-1.txt EXHIBIT 27.1