0000912057-00-028502 S-1MEF 3 333-32692 20000614 20000614 AUGUST TECHNOLOGY CORP 0001063527 3827 411729485 MN 1231 S-1MEF 33 333-39216 654534 4900 WEST 78TH STREET BLOOMINGTON MN 55435 9528200080 4900 WEST 78TH STREET BLOOMINGTON MN 55435 S-1MEF 1 s-1mef.htm S-1MEF EX-5.1 2 ex-5_1.htm EXHIBIT 5.1 EX-23.1 3 ex-23_1.txt EXHIBIT 23.1