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                                                                    EXHIBIT 23.1

                        CONSENT OF INDEPENDENT AUDITORS

The Board of Directors
August Technology Corporation:

     We consent to incorporation by reference in Registration Statement Nos.
333-45848 and 333-45850 on Forms S-8 of August Technology Corporation of our
reports dated February 11, 2002. Such reports relate to the consolidated balance
sheets of August Technology Corporation and subsidiary as of December 31, 2001
and 2000 and the related consolidated statements of operations, shareholders'
equity and comprehensive income and cash flows for each of the years in the
three-year period ended December 31, 2001 and the related financial statement
schedule, which reports appear in the December 31, 2001 Annual Report on Form
10-K of August Technology Corporation.

                                                     /s/ KPMG LLP

Minneapolis, Minnesota
March 15, 2002

