0001047469-03-007610 10-K 14 20021231 20030304 AUGUST TECHNOLOGY CORP 0001063527 3827 411729485 MN 1231 10-K 34 000-30637 03591222 4900 W 78TH ST BLOOMINGTON MN 55435 9528200080 4900 WEST 78TH STREET BLOOMINGTON MN 55435 10-K 1 a2104588z10-k.htm 10-K EX-2.1 3 a2104588zex-2_1.htm EXHIBIT 2.1 EX-10.7 4 a2104588zex-10_7.htm EXHIBIT 10.7 EX-10.8 5 a2104588zex-10_8.htm EXHIBIT 10.8 EX-10.14 6 a2104588zex-10_14.htm EXHIBIT 10.14 EX-10.31 7 a2104588zex-10_31.htm EXHIBIT 10.31 EX-10.32 8 a2104588zex-10_32.htm EXHIBIT 10.32 EX-10.33 9 a2104588zex-10_33.htm EXHIBIT 10.33 EX-10.34 10 a2104588zex-10_34.htm EXHIBIT 10.34 EX-10.35 11 a2104588zex-10_35.htm EXHIBIT 10.35 EX-10.36 12 a2104588zex-10_36.htm EXHIBIT 10.36 EX-21.1 13 a2104588zex-21_1.htm EXHIBIT 21.1 EX-23.1 14 a2104588zex-23_1.htm EXHIBIT 23.1 EX-99.1 15 a2104588zex-99_1.htm EXHIBIT 99.1