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EXHIBIT 10.39


LEASE AGREEMENT

        This Lease Agreement (this "Lease") is entered into on this the 3rd day of March, 2003 by and between 190/STI, L.P., a Texas general partnership ("Landlord"), and AUGUST TECHNOLOGY CORPORATION, a Minnesota corporation ("Tenant").

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Months in Primary Term
  Monthly Base Rent
  Rate Per Square
Foot Per Year

1-24   $ 8,893.33   $ 10.00

        The first monthly installment of the Base Rent shall be due on the Commencement Date, thereafter, monthly installments of Base Rent shall be due on the first day of each calendar month following the Commencement Date. If the Term begins on a day other than the first day of a month or ends on a day other than the last day of a month, then Base Rent and additional rent for such partial month shall be prorated.

        This is a GROSS LEASE, and Tenant is not responsible for any portion of the Taxes (as defined in Section 3 below) or any operating expenses with respect to the Premises or the Building.

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        Tenant shall not make any structural alterations, additions or improvements to the Premises without the prior written consent of Landlord which consent shall not be unreasonably withheld. Landlord shall not be required to notify Tenant of whether it consents to any structural alteration, addition or improvements until it (a) has received plans and specifications therefor which are sufficiently detailed to allow construction of the work depicted thereon to be performed in a good and workmanlike manner, and (b) has had thirty (30) days to review them. If the alteration, addition or improvement will affect the Building's Structure or Systems, then the plans and specifications therefor must be prepared by a licensed engineer acceptable to Landlord. Landlord's approval of any plans and specifications shall not be a representation or warranty that the plans or the work depicted thereon will comply with applicable Laws or be adequate for any purpose, but shall merely be Landlord's consent to performance of the work by Tenant. Upon completion of any structural alteration, addition, or improvement, Tenant shall deliver to Landlord accurate, reproducible as-built plans therefor. Tenant may erect modular office stations and other furniture and office equipment, shelves, bins, machinery and trade fixtures provided that such items (1) do not alter the basic structural character of the Premises or the Building; (2) do not overload or damage the same: and (3) may be removed without damage to the Premises. Unless Landlord specifies otherwise in writing, all alterations, additions, and improvements shall be Landlord's property when installed in the Premises: Notwithstanding the foregoing, Tenant shall have the right to make non-structural and cosmetic alterations to the Premises without obtaining Landlord's prior written consent.

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        Tenant shall have the right to place signage on the Premises or Property with the written consent of Landlord which may not be unreasonably withheld, conditioned or delayed. The size of Tenant's signage may be up to 25% of that allocable to the Building by code. Tenant shall repair, paint, and/or replace any portion of the Premises or the Building damaged or altered as a result of its signage when it is removed (including, without limitation, any discoloration of the Building). Tenant shall not (a) make any changes to the exterior of the Premises or the Building without the written consent of Landlord. Landlord shall not be required to notify Tenant of whether it consents to any sign until it (1) has received detailed, to scale drawings thereof specifying design, material composition, color scheme, and method of installation, and (2) has had a reasonable opportunity not to exceed twenty (20) days to review them.

        Tenant shall obtain and pay for all water, gas, electricity, heat, telephone, sewer, sprinkler charges and other utilities and services used at the Premises, together with any taxes, penalties, surcharges, deposits, maintenance charges, and the like pertaining to the Tenant's use of such utilities within the Premises. Landlord will, either: (a) reasonably estimate the cost of Tenant's utility and service usage in the Premises and bill Tenant on a monthly basis therefore without markup (Tenant may at any time seek review of the overall utility bills and an explanation of Landlord's estimate of Tenant's costs and if Tenant disagrees with Landlord's reasonable estimates, Tenant and Landlord agree to use reasonable efforts to resolve such dispute), or (b) at Landlord's expense, separately meter and bill Tenant directly for Tenant's use of any such utility service. Landlord shall not be liable for any interruption or failure of utility service to the Premises unless caused by Landlord's gross negligence. All amounts due from Tenant under this Section 8 shall be payable immediately upon Landlord's request therefor. Tenant is also responsible for providing janitorial services to the Premises, at Tenant's sole cost. Notwithstanding any provisions to the contrary contained in this Lease, if for any reason, any service or facility to be provided by Landlord is interrupted for a period in excess of two (2) consecutive business days after receipt of written notice of such interruption from Tenant, and the conduct of Tenant's business is significantly impaired and disturbed in the Premises or part thereof as a result of such interruption, then Tenant shall be entitled to an abatement of Monthly Base Rent that is proportionate to the part or whole of the Premises that is so affected and that is proportionate to the degree of the effect, from the commencement of such two (2) day period for the balance of the time that the Premises or part thereof is so affected. If the conduct of Tenant's business is significantly impaired or disturbed in part of the Premises as a result of such an interruption, and Tenant vacates all of the Premises in order to conduct its business elsewhere, then all Monthly Base Rent shall abate for the balance of the time during which such part is so affected.

        Tenant shall maintain (a) commercial general liability insurance (with contractual liability endorsement), including personal injury and property damage in the amount of $1,000,000.00 per occurrence combined single limit for personal injuries and death of persons and property damage occurring in or about the Premises, plus umbrella coverage of at least $3,000,000.00 per occurrence, and (b) fire and extended coverage insurance covering (1) the replacement cost of all alterations, additions, partitions and improvements installed in the Premises by or on behalf of a Tenant Party, and

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(2) the replacement cost of all of Tenant's personal property in the Premises. Such policies shall (A) name Landlord, Landlord's agents, and their respective Affiliates (defined below), as additional insurers (and as loss payees on the fire and extended coverage insurance), (B) be issued by an insurance company licensed to do business in the State of Texas with a Best's Guide Insurance Rating of A-VII, or better, and otherwise acceptable to Landlord, (C) provide that such insurance may not be canceled unless thirty (30) days' prior written notice is first given to Landlord, (D) be delivered to Landlord by Tenant before the Commencement Date and at least 30 days before each renewal thereof, and (E) provide primary coverage to Landlord when any policy issued to Landlord is similar or duplicate in coverage, in which case Landlord's policy shall be excess over Tenant's policies.

        Landlord shall procure and maintain throughout the Term, at Landlord's cost: (1) insurance on the Property (including the Premises) for one hundred percent (100%) of the full replacement value thereof against all catastrophes and casualties included in the classification "All Risks of Physical Loss" or its then-equivalent; (2) such other insurance as Landlord or Landlord's Mortgagee (hereinafter defined) shall require. The policies of insurance shall be purchased from an insurance company licensed to do business within the State of Texas with a financial rating according to A. M. Best and Company of at least "A-VII", or better. Landlord shall pay the premiums on such policies promptly when due. Certificates of insurance evidencing the insurance required to be maintained by Landlord hereunder shall be delivered to and deposited with Tenant. The insurance proceeds payable to Landlord and its mortgagee(s), if any, shall be used for repairing, restoring, and rebuilding in accordance with this Lease, and Landlord covenants and Landlord agrees to use all reasonable efforts to negotiate provisions in any debt instruments that the beneficiary of any deed of trust, the mortgagee of any mortgage, or the holder of any other lien encumbering the Property shall agree in writing to the use of the insurance proceeds for such repairing, restoring, and rebuilding subject to limitations as may be required by such beneficiary.

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        Landlord and Landlord's agents and representatives may enter the Premises during business hours, upon reasonable prior notice to Tenant, to: inspect the Premises; to make such repairs as may be required or permitted under this Lease; to perform any unperformed obligations of Tenant hereunder; and to show the Premises to prospective purchasers, mortgagees, ground lessors, and (during the last six (6) months of the Term) tenants. During the last six (6) months of the Term, Landlord may erect a sign on the Premises indicating that the Premises are available. At least thirty (30) days before the expiration date of this Lease, Landlord and Tenant shall arrange to meet for a joint inspection of the Premises. After such inspection, Landlord and Tenant shall prepare a list of items, if any, that Tenant must perform before the Vacation Date in order to comply with Tenant's obligations under Section 5.

        If more than 20% of the Premises is taken for any public or quasi-public use by right of eminent domain or private purchase in lieu thereof (a "Taking"), or any Taking that prevents or materially interferes with the Tenant's operation either party may terminate this Lease by delivering to the other written notice thereof within thirty (30) days after the Taking, in which case rent shall be abated during the unexpired portion of the Term, effective as of the date of such taking. If (a) less than 20% of the Premises are subject to a Taking or (b) more than 20% of the Premises are subject to a Taking, but the Taking does not prevent or materially interfere with the use of the remainder of the Premises for the purpose for which they were leased to Tenant, then neither party may terminate this Lease, but the rent payable during the unexpired portion of the Term shall be reduced to such extent as may be fair and reasonable under the circumstances. All compensation awarded for any Taking shall be the property of Landlord and Tenant assigns any interest it may have in any such award to Landlord; however, Landlord shall use the proceeds from such taking to restore the Premises. Landlord will have no interest in any award made to Tenant for loss of business or goodwill, for the taking of Tenant's trade fixtures and equipment and Tenant's relocation expenses, if a separate award for such items is available to Tenant and Tenant will have the right to pursue such an award.

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        Tenant shall peaceably and quietly hold and enjoy the Premises for the Term, without hindrance from any party claiming by, through, or under Landlord.

        Each of the following events shall constitute an "Event of Default" under this Lease:

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        If Landlord fails to perform any of its obligations hereunder within thirty (30) days after written notice from Tenant specifying such failure or if such failure cannot be cured in thirty (30) days, Landlord shall have additional reasonable time to cure, so long as Landlord commences and diligently pursues the cure. Tenant may seek action for damages caused by Landlord's failure to cure such default or avail itself of any other remedy available at law or in equity. Unless Landlord fails to so cure such default after such notice, Tenant shall not have any remedy or cause of action by reason thereof.

        Tenant has no authority, express or implied, to create or place any lien or encumbrance of any kind or nature whatsoever upon, or in any manner to bind Landlord's property or the interest of Landlord or Tenant in the Premises or the Building or to charge the rent or any claim in favor of any person dealing with Tenant, including those who may furnish materials or perform labor for any construction or repairs. Tenant shall pay or cause to be paid all sums due for any labor performed or materials furnished in connection with any work performed on the Premises by or at the request of

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Tenant. Tenant shall give Landlord immediate written notice of the placing of any lien or encumbrance against the Premises.

        Tenant shall have the right to assign or sublet Premises so long as Tenant continues to assume liability for performance of all its obligations under this Lease. Tenant has the right to obtain release of liability for its obligations under the Lease should the new Tenant assume all obligations under the Lease in writing and have financial strength defined as net worth equal to that of Tenant's audited financials. Except as otherwise provided above, Tenant shall not assign, transfer, mortgage, sublet, or otherwise transfer or encumber all or any part of Tenant's interest in this Lease or in the Premises, without Landlord's prior written consent, which Landlord shall not unreasonably withhold.

        The following terms shall have the following meanings:

        "Laws" shall mean all federal, state, and local laws, rules, and regulations; all court orders, governmental directives, and governmental orders; and all restrictive covenants affecting Tenant or the Premises, and "Law" shall mean any of the foregoing; "affiliate" shall mean any person or entity which, directly or indirectly, controls, is controlled by, or is under common control with the party in question; and "Tenant Party" shall include Tenant, any assignees claiming by, though, or under Tenant, any subtenants claiming by, through, or under Tenant, and any of their respective agents, contractors, employees, and invitees.

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        Each provision of this instrument or of any applicable Laws and other requirements with reference to the sending, mailing or delivering of notice or the making of any payment hereunder shall be deemed to be complied with when and if the following steps are taken;

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        The term "Hazardous Substances" as used in this Lease, shall mean pollutants, contaminants, toxic or hazardous wastes or any other substances, the removal of which is required or the use of which is restricted, prohibited or penalized by any "Environmental Law", which term shall mean any Law relating to health, pollution, or protection of the environment. Tenant hereby agrees that throughout the Term (a) no activity will be conducted on the Premises by Tenant or anyone claiming by or through Tenant that will produce any Hazardous Substances, except for such activities that are part of the ordinary course of Tenant's business activities (the "Permitted Activities") provided such Permitted Activities are conducted in accordance with all Environmental Laws; (b) the Premises will not be used in any manner for the storage of any Hazardous Substances except for any temporary storage of such materials that are used in the ordinary course of Tenant's business (the "Permitted Materials") provided such Permitted Materials are properly stored in a manner and location satisfying all Environmental Laws; (c) no portion of the Premises will be used as a landfill or a dump; (d) Tenant will not install any underground tanks of any type; (e) Tenant will not cause any surface or subsurface conditions to exist or come into existence that constitute, or with the passage of time may constitute a public or private nuisance; and (f) Tenant will not permit any Hazardous Substances to be brought onto the Premises, except for the Permitted Materials, and if so brought, or found located thereon as a result of any action by Tenant or anyone for whom Tenant is responsible, the same shall be immediately removed by Tenant, with proper disposal, and all required clean up procedures will be diligently undertaken pursuant to all Environmental Laws. If at any time during or after the Term, the Premises are found to be so contaminated, or subject to such conditions, as a result of Tenant's use of the Premises or breach of this Lease, Tenant shall defend, indemnify and hold Landlord harmless from all claims, demands, actions, liabilities, costs, expenses, damages and obligations of any nature arising from or as a result of the use of the Premises by Tenant. Unless expressly identified on an addendum to this Lease, as of the date hereof there are no "Permitted Activities" or "Permitted Materials" for purposes of the foregoing provision and none shall exist unless and until approved in writing by the Landlord. Landlord may enter the Premises and conduct environmental inspections and tests therein as it may require from time to time, provided that Landlord shall use reasonable efforts to minimize the interference with Tenant's business. Such inspections and tests shall be conducted at Landlord's expense, unless they reveal the presence of Hazardous Substances (other than Permitted Materials) or that Tenant has not complied with the requirements set forth in this Section 25, in which case, Tenant shall reimburse Landlord for the reasonable cost thereof within ten days after Landlord's request therefor. Nothing in this Section

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shall require Tenant to indemnify Landlord for any matters arising out of or caused by the actions or omissions of Landlord, its employees, agents, contractors, licensees, or invitees.

        Notwithstanding the foregoing, Landlord shall defend, indemnify and hold Tenant harmless from all claims, demands, actions, liabilities, costs, expenses, damages and obligations of any nature arising from or as a result of the presence of Hazardous Substances on or about the Building or Premises, except to the extent caused by Tenant or STI.

        EXCEPT AS OTHERWISE EXPRESSLY PROVIDED IN THIS LEASE, TENANT ACKNOWLEDGES THAT (1) NO REPRESENTATIONS AS TO THE REPAIR OF THE PREMISES, NOR PROMISES TO ALTER, REMODEL OR IMPROVE THE PREMISES HAVE BEEN MADE BY LANDLORD, AND (2) THERE ARE NO REPRESENTATIONS OR WARRANTIES, EXPRESSED, IMPLIED OR STATUTORY, THAT EXTEND BEYOND THE DESCRIPTION OF THE PREMISES.

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        EXECUTED by Tenant on March 3, 2003.

    TENANT:

 

 

AUGUST TECHNOLOGY CORPORATION

 

 

By:

/s/  
JOHN M. VASUTA      
    Printed Name: John Vasuta
    Title: V.P., General Counsel, Secretary/Officer

 

 

Address:

4900 W. 78th Street

      Edina, MN 55435

 

 

Telephone:

952/820-0080

    Fax: 952/820-0060

        EXECUTED by Landlord on February 4, 2003.

    LANDLORD:

 

 

190/STI, L.P.
By: Second Century Investments, its General Partner

 

 

By:

/s/  
LAWRENCE J. MASI      
    Printed Name: Lawrence J. Masi
    Title: Partner

 

 

Address:

7502 Greenville Ave., Suite 680

      Dallas, Texas 75231

 

 

Telephone:

214/221-4440

    Fax: 214/221-4441

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EXHIBIT A

LEGAL DESCRIPTION


EXHIBIT B

FLOOR PLAN OF PREMISES AND ADDITIONAL PREMISES

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EXHIBIT C

RULES AND REGULATIONS

1.
Landlord shall have the right to prescribe the weight, position and manner of installation of heavy equipment which, if considered necessary by Landlord, shall be installed in a manner which shall insure satisfactory weight distribution. The time, routing and manner of moving such heavy equipment shall be subject to approval by Landlord.

2.
Tenant, or the employees, agents, visitors or licensees of Tenant, shall not at any time place, leave or discard any rubbish, paper, articles or objects of any kind whatsoever outside the doors of the Premises or the Property. No animals or birds, shall be brought or kept in or about the Premises or the Property.

3.
Canvassing, soliciting or peddling in or about the Premises or the Property is prohibited and Tenant shall cooperate to prevent same.

4.
Any person in the Property will be subject to identification by employees and agents of Landlord. All persons in or entering the Property shall be required to comply with the security policies of the Property. If Tenant desires any additional security service for the Premises or the Property, Tenant shall have the right (with the prior written consent of Landlord) to obtain such additional service at Tenant's sole cost and expense. Tenant shall keep doors to unattended areas locked and shall otherwise exercise reasonable precautions to protect its property from theft, loss or damage. Landlord shall not be responsible for the theft, loss or damage of any property unless such damage is directly caused by the Landlord. Landlord shall not be responsible for any error with regard to the exclusion from or admission to the Premises or the Property of any person. In case of invasion, mob, riot or public excitement, Landlord reserves the right to prevent access to the Premises or the Property' during the continuance of same by dosing the doors or taking other measures for the safety of the tenants and protection of the Premises or the Property and property or persons therewith.

5.
Tenant shall not cause or permit any odors to permeate in or emanate from the Premises or the Property, or permit or suffer the Premises or the Property to be occupied or used in a manner offensive or objectionable to Landlord or other occupants of the Premises or the Property by reason of light, radiation, magnetism, noise, odors, and/or vibrations, or interfere in any way with other tenants or those having business in the Premises or the Property.

6.
All keys shall be returned to Landlord upon the termination of this Lease and Tenant shall give to Landlord the explanations of the combinations of all safes, vaults and combination locks remaining with the Premises. Landlord may at all times keep a pass key to the Premises. All entrance doors to the Premises shall be left closed at all times and left locked when the Premises are not in use.

7.
Tenant shall give immediate notice to Landlord in case of any known emergency at the Premises or the Property.

8.
No portion of the Premises or any part of the Property shall at any time be used or occupied as sleeping or lodging quarters.

9.
The toilet rooms, urinals, wash bowls and other apparatus in the Premises shall not be used for any purpose other than that for which they were constructed and no foreign substance of any kind whatsoever shall be thrown therein and the expense of any breakage, stoppage or damage resulting from the violation of this rule shall be borne by the Tenant who or whose employees or invitees shall have caused it.

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10.
Landlord reserves the right to exclude or expel from the Property any person who, in the judgment of Landlord, is intoxicated or under the influence of liquor or drugs, or who shall in any manner do any act in violation of any of the Rules and Regulations of the Premises or the Property.

11.
Landlord reserves the right to rescind any of these rules and regulations and to make such other and further rules and regulations as in its reasonable judgment shall, from time to time, be required for the safety, protection, care and cleanliness of the Property, the operation thereof, the preservation of good order therein and the protection and comfort of the tenants and their agents, employees, and invitees, which rules and regulations shall be binding upon it in like manner as if originally herein prescribed but shall not conflict with Tenant's rights under the Lease.

12.
Tenant shall park trailers and other oversized vehicles only in areas designated by Landlord for the parking of trailers or oversized vehicles.

13.
Tenant shall not utilize the Premises for outside storage except with the written consent of Landlord.

14.
All rules and regulations shall be enforced uniformly and in a non-discriminatory manner against all tenants of the Property.

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QuickLinks

LEASE AGREEMENT
EXHIBIT A
EXHIBIT B
EXHIBIT C