<SUBMISSION>
<ACCESSION-NUMBER>0000914190-06-000091
<TYPE>4
<PUBLIC-DOCUMENT-COUNT>1
<PERIOD>20060215
<FILING-DATE>20060217
<DATE-OF-FILING-DATE-CHANGE>20060217
<ISSUER>
<COMPANY-DATA>
<CONFORMED-NAME>AUGUST TECHNOLOGY CORP
<CIK>0001063527
<ASSIGNED-SIC>3827
<IRS-NUMBER>411729485
<STATE-OF-INCORPORATION>MN
<FISCAL-YEAR-END>1231
</COMPANY-DATA>
<BUSINESS-ADDRESS>
<STREET1>4900 W 78TH ST
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
<PHONE>9528200080
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>4900 WEST 78TH STREET
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
</MAIL-ADDRESS>
</ISSUER>
<REPORTING-OWNER>
<OWNER-DATA>
<CONFORMED-NAME>JOHNSON ARDELLE R
<CIK>0001260299
</OWNER-DATA>
<FILING-VALUES>
<FORM-TYPE>4
<ACT>34
<FILE-NUMBER>000-30637
<FILM-NUMBER>06628634
</FILING-VALUES>
<BUSINESS-ADDRESS>
<STREET1>4900 WEST 78TH ST
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
<PHONE>9528200080
</BUSINESS-ADDRESS>
</REPORTING-OWNER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
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    <documentType>4</documentType>

    <periodOfReport>2006-02-15</periodOfReport>

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        <issuerName>AUGUST TECHNOLOGY CORP</issuerName>
        <issuerTradingSymbol>AUGT</issuerTradingSymbol>
    </issuer>

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            <rptOwnerName>JOHNSON ARDELLE R</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
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            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BLOOMINGTON</rptOwnerCity>
            <rptOwnerState>MN</rptOwnerState>
            <rptOwnerZipCode>55435</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>VP, Strategic Marketing</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

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                <transactionPricePerShare>
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            <securityTitle>
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                    <value>13461</value>
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                <transactionPricePerShare>
                    <value>0</value>
                    <footnoteId id="F10"/>
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                <transactionAcquiredDisposedCode>
                    <value>D</value>
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            <exerciseDate>
                <footnoteId id="F10"/>
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                <value>2016-01-25</value>
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    </derivativeTable>

    <footnotes>
        <footnote id="F1">Pursuant to a merger agreement by and among the Issuer, Rudolph Technologies, Inc. (&quot;Rudolph&quot;) and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the &quot;Merger&quot;), the option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 34,312 shares of Rudolph common stock for $14.12 per share.</footnote>
        <footnote id="F2">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 130 shares of Rudolph common stock for $24.20 per share.</footnote>
        <footnote id="F3">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 2,168 shares of Rudolph common stock for $24.20 per share.</footnote>
        <footnote id="F4">The option, which provided for vesting in annual increments of 20% of the shares beginning July 30, 2004, was assumed by Rudolph in the Merger and replaced with an option to purchase 1,906 shares of Rudolph common stock for $13.59 per share with the same vesting terms.</footnote>
        <footnote id="F5">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 315 shares of Rudolph common stock for $10.00 per share.</footnote>
        <footnote id="F6">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 605 shares of Rudolph common stock for $10.00 per share.</footnote>
        <footnote id="F7">The option, which provided for vesting 34% of the shares on December 30, 2005 and 33% on December 30, 2006 and 2007, was assumed by Rudolph in the Merger and replaced with an option to purchase 7,625 shares of Rudolph common stock for $13.62 per share with the same vesting terms.</footnote>
        <footnote id="F8">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,772 shares of Rudolph common stock for $15.87 per share.</footnote>
        <footnote id="F9">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 287 shares of Rudolph common stock for $16.71 per share.</footnote>
        <footnote id="F10">The option, which provided for vesting in annual increments of 20% of the shares beginning January 25, 2006, was assumed by Rudolph in the Merger and replaced with an option to purchase 10,263 shares of Rudolph common stock for $14.81 per share with the same vesting terms.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Robert K. Ranum as Attorney in Fact for Ardelle R. Johnson pursuant to Power of Attorney previously filed</signatureName>
        <signatureDate>2006-02-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SUBMISSION>
