<SUBMISSION>
<ACCESSION-NUMBER>0000914190-06-000087
<TYPE>4
<PUBLIC-DOCUMENT-COUNT>1
<PERIOD>20060215
<FILING-DATE>20060217
<DATE-OF-FILING-DATE-CHANGE>20060217
<ISSUER>
<COMPANY-DATA>
<CONFORMED-NAME>AUGUST TECHNOLOGY CORP
<CIK>0001063527
<ASSIGNED-SIC>3827
<IRS-NUMBER>411729485
<STATE-OF-INCORPORATION>MN
<FISCAL-YEAR-END>1231
</COMPANY-DATA>
<BUSINESS-ADDRESS>
<STREET1>4900 W 78TH ST
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
<PHONE>9528200080
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>4900 WEST 78TH STREET
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
</MAIL-ADDRESS>
</ISSUER>
<REPORTING-OWNER>
<OWNER-DATA>
<CONFORMED-NAME>Plisinski Michael P
<CIK>0001325550
</OWNER-DATA>
<FILING-VALUES>
<FORM-TYPE>4
<ACT>34
<FILE-NUMBER>000-30637
<FILM-NUMBER>06628614
</FILING-VALUES>
<BUSINESS-ADDRESS>
<PHONE>952-820-0080
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>4900 WEST 78TH STREET
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
</MAIL-ADDRESS>
</REPORTING-OWNER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
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    <documentType>4</documentType>

    <periodOfReport>2006-02-15</periodOfReport>

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        <issuerName>AUGUST TECHNOLOGY CORP</issuerName>
        <issuerTradingSymbol>AUGT</issuerTradingSymbol>
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            <rptOwnerName>Plisinski Michael P</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
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            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>BLOOMINGTON</rptOwnerCity>
            <rptOwnerState>MN</rptOwnerState>
            <rptOwnerZipCode>55435</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
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        <reportingOwnerRelationship>
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            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>VP of Engineering</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

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                    <value>D</value>
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        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">The shares were disposed of pursuant to a merger agreement by and among the Issuer, Rudolph Technologies, Inc. (&quot;Rudolph&quot;) and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the &quot;Merger&quot;), in exchange for (i) up to 106,434 shares of Rudolph common stock have a market value of $17.92 per share on the effective date of the Merger, representing 0.7625 shares of Rudolph common stock per share of the Issuer's stock, or (ii) a cash payment of up to $1,465,653, representing $10.50 per share of the Issuer's stock, or (iii) a combination of shares and cash in amounts determined according to the election of the reporting person, if any, and the proration and allocation procedures set forth in the merger agreement; the determination of the allocation of shares and cash will be made on or about February 22, 2006.</footnote>
        <footnote id="F2">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 30,500 shares of Rudolph common stock for $9.32 per share.</footnote>
        <footnote id="F3">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 1,324 shares of Rudolph common stock for $24.20 per share.</footnote>
        <footnote id="F4">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 921 shares of Rudolph common stock for $10.00 per share.</footnote>
        <footnote id="F5">The option, which provided for vesting 34% of the shares on Deceember 30, 2004 and 33% on December 30, 2005 and 2006, was assumed by Rudolph in the Merger and replaced with an option to purchase 2,407 shares of Rudolph common stock for $13.62 per share with the same vesting terms.</footnote>
        <footnote id="F6">The option, which provided for vesting 34% of the shares on Deceember 30, 2004 and 33% on December 30, 2005 and 2006, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,217 shares of Rudolph common stock for $13.62 per share with the same vesting terms.</footnote>
        <footnote id="F7">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 1,460 shares of Rudolph common stock for $15.87 per share.</footnote>
        <footnote id="F8">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 869 shares of Rudolph common stock for $15.87 per share.</footnote>
        <footnote id="F9">The option, which provided for vesting 34% of the shares on April 29, 2005 and 33% on April 29, 2006 and 2007, was assumed by Rudolph in the Merger and replaced with an option to purchase 26,687 shares of Rudolph common stock for $15.48 per share with the same vesting terms.</footnote>
        <footnote id="F10">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 735 shares of Rudolph common stock for $16.71 per share.</footnote>
        <footnote id="F11">The option, which provided for vesting in annual increments of 20% of the shares beginning January 25, 2006, was assumed by Rudolph in the Merger and replaced with an option to purchase 11,915 shares of Rudolph common stock for $14.81 per share with the same vesting terms.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Robert K. Ranum as Agent for Michael P. Plisinski pursuant to Power of Attorney previously filed</signatureName>
        <signatureDate>2006-02-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SUBMISSION>
