<SUBMISSION>
<ACCESSION-NUMBER>0000914190-06-000092
<TYPE>4
<PUBLIC-DOCUMENT-COUNT>1
<PERIOD>20060215
<FILING-DATE>20060217
<DATE-OF-FILING-DATE-CHANGE>20060217
<ISSUER>
<COMPANY-DATA>
<CONFORMED-NAME>AUGUST TECHNOLOGY CORP
<CIK>0001063527
<ASSIGNED-SIC>3827
<IRS-NUMBER>411729485
<STATE-OF-INCORPORATION>MN
<FISCAL-YEAR-END>1231
</COMPANY-DATA>
<BUSINESS-ADDRESS>
<STREET1>4900 W 78TH ST
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
<PHONE>9528200080
</BUSINESS-ADDRESS>
<MAIL-ADDRESS>
<STREET1>4900 WEST 78TH STREET
<CITY>BLOOMINGTON
<STATE>MN
<ZIP>55435
</MAIL-ADDRESS>
</ISSUER>
<REPORTING-OWNER>
<OWNER-DATA>
<CONFORMED-NAME>GOWER ROGER E
<CIK>0001206020
</OWNER-DATA>
<FILING-VALUES>
<FORM-TYPE>4
<ACT>34
<FILE-NUMBER>000-30637
<FILM-NUMBER>06628640
</FILING-VALUES>
<BUSINESS-ADDRESS>
<STREET1>14665 SW 150TH
<CITY>TIGARD
<STATE>OR
<ZIP>97224
</BUSINESS-ADDRESS>
</REPORTING-OWNER>
<DOCUMENT>
<TYPE>4
<SEQUENCE>1
<FILENAME>edgar.xml
<DESCRIPTION>PRIMARY DOCUMENT
<TEXT>
<XML>
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<ownershipDocument>

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    <documentType>4</documentType>

    <periodOfReport>2006-02-15</periodOfReport>

    <issuer>
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        <issuerName>AUGUST TECHNOLOGY CORP</issuerName>
        <issuerTradingSymbol>AUGT</issuerTradingSymbol>
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            <rptOwnerName>GOWER ROGER E</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>2340 W. COUNTY RD. C</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>ST. PAUL</rptOwnerCity>
            <rptOwnerState>MN</rptOwnerState>
            <rptOwnerZipCode>55113</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>0</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
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    </reportingOwner>

    <derivativeTable>
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            <expirationDate>
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            <expirationDate>
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            <underlyingSecurity>
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            <ownershipNature>
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                <natureOfOwnership>
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                </natureOfOwnership>
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        </derivativeTransaction>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
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            </conversionOrExercisePrice>
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                <transactionPricePerShare>
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            <expirationDate>
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        <derivativeTransaction>
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                <transactionPricePerShare>
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            <expirationDate>
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            <underlyingSecurity>
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        <derivativeTransaction>
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                <value>Stock Option (right to buy)</value>
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        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (right to buy)</value>
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                <equitySwapInvolved>0</equitySwapInvolved>
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            <transactionAmounts>
                <transactionShares>
                    <value>917</value>
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                <transactionPricePerShare>
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                <transactionAcquiredDisposedCode>
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            <exerciseDate>
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            <expirationDate>
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            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
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                <underlyingSecurityShares>
                    <value>917</value>
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        </derivativeTransaction>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (right to buy)</value>
            </securityTitle>
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                <transactionCode>D</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
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            <transactionAmounts>
                <transactionShares>
                    <value>5927</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F10"/>
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                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
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            <exerciseDate>
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            <expirationDate>
                <value>2011-01-08</value>
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            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>5927</value>
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                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
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        </derivativeTransaction>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>8.80</value>
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            <transactionDate>
                <value>2006-02-15</value>
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            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>D</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
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                <transactionShares>
                    <value>6500</value>
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                <transactionPricePerShare>
                    <footnoteId id="F11"/>
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                <transactionAcquiredDisposedCode>
                    <value>D</value>
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            <expirationDate>
                <value>2012-01-07</value>
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            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>6500</value>
                </underlyingSecurityShares>
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                <sharesOwnedFollowingTransaction>
                    <value>0</value>
                </sharesOwnedFollowingTransaction>
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            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
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                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
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        </derivativeTransaction>
        <derivativeTransaction>
            <securityTitle>
                <value>Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>11.29</value>
            </conversionOrExercisePrice>
            <transactionDate>
                <value>2006-02-15</value>
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                <transactionFormType>4</transactionFormType>
                <transactionCode>D</transactionCode>
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            <transactionAmounts>
                <transactionShares>
                    <value>6500</value>
                </transactionShares>
                <transactionPricePerShare>
                    <footnoteId id="F12"/>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
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            <exerciseDate>
                <footnoteId id="F12"/>
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            <expirationDate>
                <value>2013-01-25</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>6500</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>0</value>
                </sharesOwnedFollowingTransaction>
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            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
                <natureOfOwnership>
                    <value></value>
                </natureOfOwnership>
            </ownershipNature>
        </derivativeTransaction>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Pursuant to a merger agreement by and among the Issuer, Rudolph Technologies, Inc. (&quot;Rudolph&quot;) and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the &quot;Merger&quot;), the option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,718 shares of Rudolph common stock for $3.11 per share.</footnote>
        <footnote id="F2">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,718 shares of Rudolph common stock for $17.55 per share.</footnote>
        <footnote id="F3">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,718 shares of Rudolph common stock for $13.12 per share.</footnote>
        <footnote id="F4">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 214 shares of Rudolph common stock for $18.68 per share.</footnote>
        <footnote id="F5">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 648 shares of Rudolph common stock for $6.17 per share.</footnote>
        <footnote id="F6">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 642 shares of Rudolph common stock for $6.23 per share.</footnote>
        <footnote id="F7">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 745 shares of Rudolph common stock for $6.71 per share.</footnote>
        <footnote id="F8">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 3,812 shares of Rudolph common stock for $6.71 per share.</footnote>
        <footnote id="F9">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 699 shares of Rudolph common stock for $5.72 per share.</footnote>
        <footnote id="F10">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,519 shares of Rudolph common stock for $29.71 per share.</footnote>
        <footnote id="F11">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,956 shares of Rudolph common stock for $11.55 per share.</footnote>
        <footnote id="F12">The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,956 shares of Rudolph common stock for $14.81 per share.</footnote>
    </footnotes>

    <remarks></remarks>

    <ownerSignature>
        <signatureName>/s/ Robert K. Ranum as Agent for Roger E. Gower pursuant to Power of Attorney previously filed.</signatureName>
        <signatureDate>2006-02-16</signatureDate>
    </ownerSignature>
</ownershipDocument>
</XML>
</TEXT>
</DOCUMENT>
</SUBMISSION>
